Neutral atoms or condensed matter cannot emit EUV radiation. Ionization must take place first. EUV light can only be emitted by electrons which are bound to multicharged positive ions; for example, to remove an electron from a +3 charged carbon ion (three electrons already removed) requires about 65 eV.[1] Such electrons are more tightly bound than typical valence electrons. The existence of multicharged positive ions is only possible in a hot dense plasma. The Xe or Sn plasma sources for EUV lithography are either discharge-produced or laser-produced. Power output exceeding 100 W is a requirement for sufficient throughput. While state-of-the-art 193 nm excimer lasers offer intensities of 200 W/cm2,[2] lasers for producing EUV-generating plasmas need to be much more intense, on the order of 1011 W/cm2.[3] This indicates the enormous energy burden imposed by switching from generating 193 nm light (laser output approaching 100 W)[4] to generating EUV light (required laser or equivalent power source output exceeding 10 kW).[5]
A further characteristic of the plasma-based EUV sources under development is that they are not even partially coherent,[6] unlike the KrF and ArF excimer lasers used for current optical lithography. Further power reduction (energy loss) is expected in converting incoherent sources (emitting in all possible directions at many independent wavelengths) to partially coherent (emitting in a limited range of directions within a narrow band of wavelengths) sources by filtering (unwanted wavelengths and directions). On the other hand, coherent light poses a risk of monochromatic reflection interference and mismatch of multilayer reflectance bandwidth.[7]
As of 2008, the development tools had a throughput of 4 wafers per hour with a 120 W source.[8] For a 100 WPH requirement, therefore, a 3 kW source would be needed, which is not available in the foreseeable future. However, EUV photon count is determined by the number of electrons generated per photon which are collected by a photodiode; since this is essentially the highly variable secondary yield of the initial photoelectron, the dose measurement will be impacted by high variability. In fact, data by Gullikson et al.[9] indicated ~10% natural variation of the photocurrent responsivity. More recent data for silicon photodiodes remain consistent with this assessment.[10] Calibration of the EUV dosimeter is a nontrivial unsolved issue.[11] The secondary electron number variability is the well-known root cause of noise in avalanche photodiodes.[12]
Wednesday, December 1, 2010
Space Robotics
Robot is a system with a mechanical body, using computer as its brain. Integrating the sensors and actuators built into the mechanical body, the motions are realised with the computer software to execute the desired task. Robots are more flexible in terms of ability to perform new tasks or to carry out complex sequence of motion than other categories of automated manufacturing equipment. Today there is lot of interest in this field and a separate branch of technology 'robotics' has emerged. It is concerned with all problems of robot design, development and applications. The technology to substitute or subsidise the manned activities in space is called space robotics. Various applications of space robots are the inspection of a defective satellite, its repair, or the construction of a space station and supply goods to this station and its retrieval etc. With the over lap of knowledge of kinematics, dynamics and control and progress in fundamental technologies it is about to become possible to design and develop the advanced robotics systems. And this will throw open the doors to explore and experience the universe and bring countless changes for the better in the ways we live.
Areas Of Application
The space robot applications can be classified into the following four categories
1 In-orbit positioning and assembly: For deployment of satellite and for assembly of modules to satellite/space station.
2 Operation: For conducting experiments in space lab.
3 Maintenance: For removal and replacement of faulty modules/packages.
4 Resupply: For supply of equipment, materials for experimentation in space lab and for the resupply of fuel.
The following examples give specific applications under the above categories
Scientific experimentation:
Conduct experimentation in space labs that may include
" Metallurgical experiments which may be hazardous.
" Astronomical observations.
" Biological experiments.
Assist crew in space station assembly
" Assist in deployment and assembly out side the station.
" Assist crew inside the space station: Routine crew functions inside the space station and maintaining life support system.
Space servicing functions
" Refueling.
" Replacement of faulty modules.
" Assist jammed mechanism say a solar panel, antenna etc.
Space craft enhancements
" Replace payloads by an upgraded module.
" Attach extra modules in space.
Space tug
" Grab a satellite and effect orbital transfer.
" Efficient transfer of satellites from low earth orbit to geostationary orbit.
Areas Of Application
The space robot applications can be classified into the following four categories
1 In-orbit positioning and assembly: For deployment of satellite and for assembly of modules to satellite/space station.
2 Operation: For conducting experiments in space lab.
3 Maintenance: For removal and replacement of faulty modules/packages.
4 Resupply: For supply of equipment, materials for experimentation in space lab and for the resupply of fuel.
The following examples give specific applications under the above categories
Scientific experimentation:
Conduct experimentation in space labs that may include
" Metallurgical experiments which may be hazardous.
" Astronomical observations.
" Biological experiments.
Assist crew in space station assembly
" Assist in deployment and assembly out side the station.
" Assist crew inside the space station: Routine crew functions inside the space station and maintaining life support system.
Space servicing functions
" Refueling.
" Replacement of faulty modules.
" Assist jammed mechanism say a solar panel, antenna etc.
Space craft enhancements
" Replace payloads by an upgraded module.
" Attach extra modules in space.
Space tug
" Grab a satellite and effect orbital transfer.
" Efficient transfer of satellites from low earth orbit to geostationary orbit.
STEALTH FIGHTER
tealth means 'low observable'. The very basic idea of Stealth Technology in the military is to 'blend' in with the background. The quest for a stealthy plane actually began more than 50 years ago during World War II when RADAR was first used as an early warning system against fleets of bombers. As a result of that quest, the Stealth Technology evolved. Stealth Technology is used in the construction of mobile military systems such as aircrafts and ships to significantly reduce their detection by enemy, primarily by an enemy RADAR. The way most airplane identification works is by constantly bombarding airspace with a RADAR signal.
When a plane flies into the path of the RADAR, a signal bounces back to a sensor that determines the size and location of the plane. Other methods focus on measuring acoustic (sound) disturbances, visual contact, and infrared (heat) signatures. Stealth technologies work by reducing or eliminating these telltale signals. Panels on planes are angled so that radar is scattered and no signal returns. Planes are also covered in a layer of absorbent materials that reduce any other signature the plane might leave. Shape also has a lot to do with the `invisibility' of stealth planes. Extreme aerodynamics keeps air turbulence to a minimum and cut down on flying noise. Special low-noise engines are contained inside the body of the plane. Hot fumes are then capable of being mixed with cool air before leaving the plane. This fools heat sensors on the ground. This also keeps heat seeking missiles from getting any sort of a lock on their targets.
Stealth properties give it the unique ability to penetrate an enemy's most sophisticated defenses and threaten its most valued and heavily defended targets. At a cost of $2 billion each, stealth bombers are not yet available worldwide, but military forces around the world will soon begin to attempt to mimic some of the key features of stealth planes, making the skies much more dangerous.
HISTORY OF STEALTH AIRCRAFT
With the increasing use of early warning detection devices such as radar by militaries around the world in the 1930's the United States began to research and develop aircraft that would be undetectable to radar detection systems. The first documented stealth prototype was built out of two layers of plywood glued together with a core of glue and sawdust. This prototype's surface was coated with charcoal to absorb radar signals from being reflected back to the source, which is how radar detection systems detect items in the air.
Jack Northrop built a flying wing in the 1940's. His plane was the first wave of stealth aircraft that actually flew. The aircraft proved to be highly unstable and hard to fly due to design flaws. The United States initially orders 170 of these aircraft from Northrop but cancelled the order after finding that the plane had stability Flaws. Then in 1964, SR-71 the first Stealth airplane launched. It is well known as 'black bird'. It is a jet black bomber with slanted surfaces. This aircraft was built to fly high and fast to be able to bypass radar by its altitude and speed.
HOW DOES STEALTH TECHNOLOGY WORK?
The idea is for the radar antenna to send out a burst of radio energy, which is then reflected back by any object it happens to encounter. The radar antenna measures the time it takes for the reflection to arrive, and with that information can tell how far away the object is. The metal body of an airplane is very good at reflecting radar signals, and this makes it easy to find and track airplanes with radar equipment.
The goal of stealth technology is to make an airplane invisible to radar. There are two different ways to create invisibility: The airplane can be shaped so that any radar signals it reflects are reflected away from the radar equipment. The airplane can be covered in materials that absorb radar signals.
When a plane flies into the path of the RADAR, a signal bounces back to a sensor that determines the size and location of the plane. Other methods focus on measuring acoustic (sound) disturbances, visual contact, and infrared (heat) signatures. Stealth technologies work by reducing or eliminating these telltale signals. Panels on planes are angled so that radar is scattered and no signal returns. Planes are also covered in a layer of absorbent materials that reduce any other signature the plane might leave. Shape also has a lot to do with the `invisibility' of stealth planes. Extreme aerodynamics keeps air turbulence to a minimum and cut down on flying noise. Special low-noise engines are contained inside the body of the plane. Hot fumes are then capable of being mixed with cool air before leaving the plane. This fools heat sensors on the ground. This also keeps heat seeking missiles from getting any sort of a lock on their targets.
Stealth properties give it the unique ability to penetrate an enemy's most sophisticated defenses and threaten its most valued and heavily defended targets. At a cost of $2 billion each, stealth bombers are not yet available worldwide, but military forces around the world will soon begin to attempt to mimic some of the key features of stealth planes, making the skies much more dangerous.
HISTORY OF STEALTH AIRCRAFT
With the increasing use of early warning detection devices such as radar by militaries around the world in the 1930's the United States began to research and develop aircraft that would be undetectable to radar detection systems. The first documented stealth prototype was built out of two layers of plywood glued together with a core of glue and sawdust. This prototype's surface was coated with charcoal to absorb radar signals from being reflected back to the source, which is how radar detection systems detect items in the air.
Jack Northrop built a flying wing in the 1940's. His plane was the first wave of stealth aircraft that actually flew. The aircraft proved to be highly unstable and hard to fly due to design flaws. The United States initially orders 170 of these aircraft from Northrop but cancelled the order after finding that the plane had stability Flaws. Then in 1964, SR-71 the first Stealth airplane launched. It is well known as 'black bird'. It is a jet black bomber with slanted surfaces. This aircraft was built to fly high and fast to be able to bypass radar by its altitude and speed.
HOW DOES STEALTH TECHNOLOGY WORK?
The idea is for the radar antenna to send out a burst of radio energy, which is then reflected back by any object it happens to encounter. The radar antenna measures the time it takes for the reflection to arrive, and with that information can tell how far away the object is. The metal body of an airplane is very good at reflecting radar signals, and this makes it easy to find and track airplanes with radar equipment.
The goal of stealth technology is to make an airplane invisible to radar. There are two different ways to create invisibility: The airplane can be shaped so that any radar signals it reflects are reflected away from the radar equipment. The airplane can be covered in materials that absorb radar signals.
Optical Satellite Communication
The European Space Agency (ESA) has programmes underway to place Satellites carrying optical terminals in GEO orbit within the next decade. The first is the ARTEMIS technology demonstration satellite which carries both microwave and SILEX (Semiconductor Laser Intro satellite Link Experiment) optical interorbit communications terminal. SILEX employs direct detection and GaAIAs diode laser technology; the optical antenna is a 25cm diameter reflecting telescope.
The SILEX GEO terminal is capable of receiving data modulated on to an incoming laser beam at a bit rate of 50 Mbps and is equipped with a high power beacon for initial link acquisition together with a low divergence (and unmodulated) beam which is tracked by the communicating partner. ARTEMIS will be followed by the operational European data relay system (EDRS) which is planned to have data relay Satellites (DRS). These will also carry SILEX optical data relay terminals.
Once these elements of Europe's space Infrastructure are in place, these will be a need for optical communications terminals on LEO satellites which are capable of transmitting data to the GEO terminals. A wide range of LEO space craft is expected to fly within the next decade including earth observation and science, manned and military reconnaissance system.
The LEO terminal is referred to as a user terminal since it enables real time transfer of LEO instrument data back to the ground to a user access to the DRS s LEO instruments generate data over a range of bit rates extending of Mbps depending upon the function of the instrument. A significant proportion have data rates falling in the region around and below 2 Mbps. and the data would normally be transmitted via an S-brand microwave IOL
ESA initiated a development programme in 1992 for LEO optical IOL terminal targeted at the segment of the user community. This is known as SMALL OPTICAL USER TERMINALS (SOUT) with features of low mass, small size and compatibility with SILEX. The programme is in two phases. Phase I was to produce a terminal flight configuration and perform detailed subsystem design and modelling. Phase 2 which started in september 1993 is to build an elegant bread board of the complete terminal.
The SILEX GEO terminal is capable of receiving data modulated on to an incoming laser beam at a bit rate of 50 Mbps and is equipped with a high power beacon for initial link acquisition together with a low divergence (and unmodulated) beam which is tracked by the communicating partner. ARTEMIS will be followed by the operational European data relay system (EDRS) which is planned to have data relay Satellites (DRS). These will also carry SILEX optical data relay terminals.
Once these elements of Europe's space Infrastructure are in place, these will be a need for optical communications terminals on LEO satellites which are capable of transmitting data to the GEO terminals. A wide range of LEO space craft is expected to fly within the next decade including earth observation and science, manned and military reconnaissance system.
The LEO terminal is referred to as a user terminal since it enables real time transfer of LEO instrument data back to the ground to a user access to the DRS s LEO instruments generate data over a range of bit rates extending of Mbps depending upon the function of the instrument. A significant proportion have data rates falling in the region around and below 2 Mbps. and the data would normally be transmitted via an S-brand microwave IOL
ESA initiated a development programme in 1992 for LEO optical IOL terminal targeted at the segment of the user community. This is known as SMALL OPTICAL USER TERMINALS (SOUT) with features of low mass, small size and compatibility with SILEX. The programme is in two phases. Phase I was to produce a terminal flight configuration and perform detailed subsystem design and modelling. Phase 2 which started in september 1993 is to build an elegant bread board of the complete terminal.
Optical Satellite Communication
The European Space Agency (ESA) has programmes underway to place Satellites carrying optical terminals in GEO orbit within the next decade. The first is the ARTEMIS technology demonstration satellite which carries both microwave and SILEX (Semiconductor Laser Intro satellite Link Experiment) optical interorbit communications terminal. SILEX employs direct detection and GaAIAs diode laser technology; the optical antenna is a 25cm diameter reflecting telescope.
The SILEX GEO terminal is capable of receiving data modulated on to an incoming laser beam at a bit rate of 50 Mbps and is equipped with a high power beacon for initial link acquisition together with a low divergence (and unmodulated) beam which is tracked by the communicating partner. ARTEMIS will be followed by the operational European data relay system (EDRS) which is planned to have data relay Satellites (DRS). These will also carry SILEX optical data relay terminals.
Once these elements of Europe's space Infrastructure are in place, these will be a need for optical communications terminals on LEO satellites which are capable of transmitting data to the GEO terminals. A wide range of LEO space craft is expected to fly within the next decade including earth observation and science, manned and military reconnaissance system.
The LEO terminal is referred to as a user terminal since it enables real time transfer of LEO instrument data back to the ground to a user access to the DRS s LEO instruments generate data over a range of bit rates extending of Mbps depending upon the function of the instrument. A significant proportion have data rates falling in the region around and below 2 Mbps. and the data would normally be transmitted via an S-brand microwave IOL
ESA initiated a development programme in 1992 for LEO optical IOL terminal targeted at the segment of the user community. This is known as SMALL OPTICAL USER TERMINALS (SOUT) with features of low mass, small size and compatibility with SILEX. The programme is in two phases. Phase I was to produce a terminal flight configuration and perform detailed subsystem design and modelling. Phase 2 which started in september 1993 is to build an elegant bread board of the complete terminal.
The SILEX GEO terminal is capable of receiving data modulated on to an incoming laser beam at a bit rate of 50 Mbps and is equipped with a high power beacon for initial link acquisition together with a low divergence (and unmodulated) beam which is tracked by the communicating partner. ARTEMIS will be followed by the operational European data relay system (EDRS) which is planned to have data relay Satellites (DRS). These will also carry SILEX optical data relay terminals.
Once these elements of Europe's space Infrastructure are in place, these will be a need for optical communications terminals on LEO satellites which are capable of transmitting data to the GEO terminals. A wide range of LEO space craft is expected to fly within the next decade including earth observation and science, manned and military reconnaissance system.
The LEO terminal is referred to as a user terminal since it enables real time transfer of LEO instrument data back to the ground to a user access to the DRS s LEO instruments generate data over a range of bit rates extending of Mbps depending upon the function of the instrument. A significant proportion have data rates falling in the region around and below 2 Mbps. and the data would normally be transmitted via an S-brand microwave IOL
ESA initiated a development programme in 1992 for LEO optical IOL terminal targeted at the segment of the user community. This is known as SMALL OPTICAL USER TERMINALS (SOUT) with features of low mass, small size and compatibility with SILEX. The programme is in two phases. Phase I was to produce a terminal flight configuration and perform detailed subsystem design and modelling. Phase 2 which started in september 1993 is to build an elegant bread board of the complete terminal.
VISNAV
The VISNAV system uses a Position Sensitive Diode (PSD) sensor for 6 DOF estimation. Output current from the PSD sensor determines the azimuth and elevation of the light source with respect to the sensor. By having four or more light source called beacons in the target frame at known positions the six degree of freedom data associated with the sensor is calculated.
The beacon channel separation and demodulation are done on a fixed point digital signal processor (DSP) Texas Instruments TMS320C55x [2] using digital down conversion, synchronous detection and multirate signal processing techniques. The demodulated sensor currents due to each beacon are communicated to a floating point DSP Texas Instruments TMS320VC33 [2] for subsequent navigation solution by the use of colinearity equations.
Among other competitive systems [3] a differential global positioning system (GPS) is limited to midrange accuracies, lower bandwidth, and requires complex infrastructures. The sensor systems based on differential GPS are also limited by geometric dilution of precision, multipath errors, receiver errors, etc.These limitations can be overcome by using the DSP embedded VISNAV system
FACTORS AFECTING MEASUREMENT
There is likely to be a large amount of ambient light at short wavelength and low carrier frequencies due to perhaps the sun, its reflections, incandescent or discharge tube lights, LCD and cathode ray tube displays etc. In many cases this ambient energy would swap a relatively small beacon signal and the PSD centroid data would mostly correspond to this unwanted background light.
In order to avoid this problem by modulating the beacon controller current by a sinusoidal carrier of high frequency. The resulting PSD signal currents then vary sinsuoidally at approximately the same frequency and have to be demodulated to recover the actual current proportional to the beacon light centroid. This modulation or demodulation scheme leads high degree of insensitivity to variations in ambient light and it is a key to make the PSD sensing approach practical.
The beacon channel separation and demodulation are done on a fixed point digital signal processor (DSP) Texas Instruments TMS320C55x [2] using digital down conversion, synchronous detection and multirate signal processing techniques. The demodulated sensor currents due to each beacon are communicated to a floating point DSP Texas Instruments TMS320VC33 [2] for subsequent navigation solution by the use of colinearity equations.
Among other competitive systems [3] a differential global positioning system (GPS) is limited to midrange accuracies, lower bandwidth, and requires complex infrastructures. The sensor systems based on differential GPS are also limited by geometric dilution of precision, multipath errors, receiver errors, etc.These limitations can be overcome by using the DSP embedded VISNAV system
FACTORS AFECTING MEASUREMENT
There is likely to be a large amount of ambient light at short wavelength and low carrier frequencies due to perhaps the sun, its reflections, incandescent or discharge tube lights, LCD and cathode ray tube displays etc. In many cases this ambient energy would swap a relatively small beacon signal and the PSD centroid data would mostly correspond to this unwanted background light.
In order to avoid this problem by modulating the beacon controller current by a sinusoidal carrier of high frequency. The resulting PSD signal currents then vary sinsuoidally at approximately the same frequency and have to be demodulated to recover the actual current proportional to the beacon light centroid. This modulation or demodulation scheme leads high degree of insensitivity to variations in ambient light and it is a key to make the PSD sensing approach practical.
Friday, October 29, 2010
Light Trees
Today, there is a general consensus that, in the near future, wide area networks
(WAN)(such as, a nation wide backbone network) will be based on Wavelength
Division Multiplexed (WDM) optical networks. One of the main advantages of a WDM
WAN over other optical technologies, such as, Time Division Multiplexed (TDM)
optical networks, is that it allows us to exploit the enormous bandwidth of an optical
fiber (up to 50 terabits bits per second) with requiring electronic devices, which operate
at extremely high speeds.
(WAN)(such as, a nation wide backbone network) will be based on Wavelength
Division Multiplexed (WDM) optical networks. One of the main advantages of a WDM
WAN over other optical technologies, such as, Time Division Multiplexed (TDM)
optical networks, is that it allows us to exploit the enormous bandwidth of an optical
fiber (up to 50 terabits bits per second) with requiring electronic devices, which operate
at extremely high speeds.
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